FOUP Cleaning Systems

Fully automatic FOUP cleaning system for 300mm wafers

300mm wafers have become the industry standard for semiconductor development and manufacturing. Exceptional FOUP cleaning is required for advanced products especially with the introduction of EUV lithography.

We offer FOUP cleaning system with excellent performance, throughput and reliability. Advancements for the new system include higher throughput, energy savings, and a smaller footprint. It also in compliance with SEMI standard, GEM300, CE marking and UL.

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